AltiSurf^© 530

Developed primarily for semiconductor applications, the AltiSurf 530 also serves as the foundation for numerous metrology stations tailored to very specific customer needs.

Like the AltiSurf 500 and 520, it can integrate all types of sensors and mounting.

SPECIFICATIONS

AXES:

− Travel in X, Y, Z (mm): 300 × 300 × 300− Motorized DC axes

− Flatness less than 2µm over 300mm after correction

− Max Speed: up to 40 mm/s

− Option: 0.1 µm encoder

− Option: double rotation axis

SENSORS:

– Wide range of onboard sensors:

• Contact: inductive probe diamond tip, µ-force

• Non-contact: confocal, laser triangulation, interferometric

− High-resolution camera

HMI:

– Automated mode for production

− Link with automation systems

– Workshop control (red light/green light)

– Protocol definition through self-learning

QUALIFICATIONS:

– Clean room

– CE

– Compliance with Machinery Directive