AltiSurf^© 575

Developed for high-capacity applications, the AltiSurf^© 575 is specifically designed for measuring large and oversized parts. It is perfectly suited for plastic panels, thin glass substrates, plastic sheets, cut or stamped metal sheets, smart cards, as well as electronic components such as silicon or smartphone glasses.

Thanks to its large upper gantry, it allows for easy positioning of heavy loads directly on the granite base, facilitating clamping and enabling automated loading.

Like the AltiSurf^© 500, 520, and 530 models, it can integrate multiple types of sensors and different holding systems (balls, vacuum, or air film). It also features a new generation of optical sensors, ideal for multi-sample measurements and complete metrology of dimensions, shape, and thickness.

Its numerous options make it a powerful tool for both R&D and production control.

Measurement Principles:

• Confocal Chromatic

• Visible and IR Interferometry

• Laser Triangulation

• Contact Probe

Structural Dimensions:

• Weight: 365kg

• Dimensions (L x W x H): 1244 x 1205 x 400 mm

• Measurement Capacity (X x Y x Z): 750 x 750 x 75 mm

Measurement Ranges:

• Axis Speed: Up to 100 mm/s or 45 mm/s

• Axis Resolution: 4 µm / 1 µm

• Measurement Range: 100 µm to 40 mm

• Z Resolution: From 3 nm

• Lateral Resolution: From 0.9 µm

Measurement Performance:

• Step Height Accuracy (9.4 µm): 0.1%

• Roughness Accuracy (Ra 0.3 µm): 0.3%

• Minimum Thickness Measurement: 4 µm

Usage Information:

• Standards:

ISO 21920

ISO 25178

ISO 4287

• Software:

  Acquisition: PhéNIX^©

  Analysis: PheNIX^© Map/AltiMap

Specific Information:

• Ability to measure all surfaces (rough, transparent, polished...)

• Multi-sensor architecture (confocal, interferometric, I/R)

• IR Technology: thickness measurement on silicon without suction placement

• Optical Measurement: no damage to the measured part

• Push-button interface - easy to use